The Electrical and Computer Engineering department at the University of Denver, has a 1000 square foot, micro/nanofabrication facility. The facility includes a 200 square foot class 100 yellow room with full lithography capabilities.  In addition, thermal processing, metal deposition, metrology and inspection, wet etching as well as electrical measurement and characterization tools are available in the lab for Integrated Nanosystem Group members.

Equipment Available in the Nanofabrication and Measurement Laboratory:
(1) Cobilt CA-800 Mask Aligner
(2) Plasmos SD2000 Ellipsometer
(3) Gartener Scientific Model L115A Ellipsometer
(4) Denton Vacuum DV501 Evaporator
(5) Veeco VE401 Evaporator
(6) Thermco MB-71, oxidation/doping/annealing furnace
(7) Lindberg high temperature oven
(8) Optical Spectrum Analyzer
(9) Laser Driver
(10) MARPET MEI1204W Wire Wedge Bonder
(11) HP-8753D Network Analyzer
(12) KarlSuss PM-8 Probe Station
(13) Other basic micro/nano-fabrication equipment and accessories such as spinners, hot-plates, ovens, etc.
 

Other Major Equipment on DU Campus Available to the Group:
SEM: The School of Engineering and Computer Science has a JEOL 5800LV scanning electron microscope (SEM) equipped with secondary and backscatter electron detectors, and an X-ray detector for energy dispersive spectroscopy (EDS).  The instrument can operate at low vacuum (<2 torr) for analysis of uncoated and biological samples.

AFM: School of Engineering and Computer Science shares an MFP-3D Atomic Force Microscope with bio-sample capability with the school of Natural Sciences and Mathematics.